JPH03109329U - - Google Patents
Info
- Publication number
- JPH03109329U JPH03109329U JP1728290U JP1728290U JPH03109329U JP H03109329 U JPH03109329 U JP H03109329U JP 1728290 U JP1728290 U JP 1728290U JP 1728290 U JP1728290 U JP 1728290U JP H03109329 U JPH03109329 U JP H03109329U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- supply nozzle
- thin film
- gas supply
- water cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 20
- 238000001816 cooling Methods 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000000498 cooling water Substances 0.000 claims description 5
- 239000012495 reaction gas Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1728290U JPH03109329U (en]) | 1990-02-21 | 1990-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1728290U JPH03109329U (en]) | 1990-02-21 | 1990-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03109329U true JPH03109329U (en]) | 1991-11-11 |
Family
ID=31520507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1728290U Pending JPH03109329U (en]) | 1990-02-21 | 1990-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03109329U (en]) |
-
1990
- 1990-02-21 JP JP1728290U patent/JPH03109329U/ja active Pending